Photoresist characterization and linearization procedure for the gray-scale fabrication of diffractive optical elements.
نویسندگان
چکیده
We present a procedure for the characterization and the linearization of the photoresist response to UV exposure for application to the gray-scale fabrication of diffractive optical elements. A simple and reliable model is presented as part of the characterization procedure. Application to the fabrication of surface-relief diffractive optical elements is presented, and theoretical predictions are shown to agree well with experiments.
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ورودعنوان ژورنال:
- Applied optics
دوره 40 32 شماره
صفحات -
تاریخ انتشار 2001